DURABLE HIGH-TEMPERATURE HUMIDITY SENSORS FOR PRECISION FOOD PROCESSING

Overall goal: Create a solid-state humidity sensors for high-temperature food processing applications.Phase I Technical Objectives:Study deposition of hafnium oxide (HfO2) using atomic layer depositionFabricate humidity sensors using a porous α-Al2O3 structures with a HfO2/SiO2 stack layerCalibrate the sensors at moderate temperatures (25-95°C) and test the durability of the humidity sensors by exposing them to high temperature of 300°C for a long time.